Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/06/2019
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Application #:
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14080685
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Filing Dt:
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11/14/2013
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Publication #:
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Pub Dt:
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08/07/2014
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Inventors:
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Toru MARUYAMA, Fujihiko TOYOMASU, Mitsunori KOMATSU
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Title:
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SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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11-1, HANEDA ASAHI-CHO |
OHTA-KU |
TOKYO, JAPAN |
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WOODCOCK WASHBURN LLP |
2929 ARCH STREET |
CIRA CENTRE, 12TH FLOOR |
PHILADELPHIA, PA 19104-2891 |
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