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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
14246801
Filing Dt:
04/07/2014
Publication #:
Pub Dt:
08/07/2014
Inventors:
Alain Duboust, Wen-Chiang Tu, Shih-Haur Shen, Jimin Zhang, Ingemar Carlsson et al
Title:
ENDPOINT CONTROL OF MULTIPLE SUBSTRATES OF VARYING THICKNESS ON THE SAME PLATEN IN CHEMICAL MECHANICAL POLISHING
Assignment: 1
Reel/Frame:
032841/0442Recorded: 05/07/2014Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/23/2011
Exec Dt:
02/10/2011
Exec Dt:
02/11/2011
Exec Dt:
02/09/2011
Exec Dt:
02/09/2011
Exec Dt:
02/09/2011
Exec Dt:
02/09/2011
Exec Dt:
02/09/2011
Exec Dt:
02/25/2011
Exec Dt:
02/10/2011
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
INDRANIL SARKAR
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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