Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/23/2016
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Application #:
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14259696
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Filing Dt:
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04/23/2014
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Publication #:
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Pub Dt:
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08/14/2014
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Inventors:
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Sukesh Janubhai Patel, Sanjeev Kaushal, Kenji Sugishima
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Title:
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METHOD AND APPARATUS FOR SELF-LEARNING AND SELF-IMPROVING A SEMICONDUCTOR MANUFACTURING TOOL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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| AMIN, TUROCY & WATSON, LLP |
| 127 PUBLIC SQUARE |
| 57TH FLOOR, KEY TOWER |
| CLEVELAND, OH 44114 |
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