Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14018013
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Filing Dt:
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09/04/2013
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Publication #:
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Pub Dt:
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08/21/2014
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Inventors:
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Ryoji Yoshikawa, Daisuke Kawamura, Seiji Morita, Tatsuhiko Higashiki, Takashi Hirano
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Title:
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LITHOGRAPHY ORIGINAL CHECKING DEVICE, LITHOGRAPHY ORIGINAL CHECKING METHOD, AND PATTERN DATA CREATING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| FINNEGAN |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, DC, DC 20001 |
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