Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/02/2015
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Application #:
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13884028
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Filing Dt:
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05/08/2013
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Publication #:
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Pub Dt:
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08/28/2014
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Inventors:
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Yang Xiang, Changsong Yu
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Title:
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APPARATUSES AND METHODS FOR DETECTING WAVE FRONT ABBERATION OF PROJECTION OBJECTIVE SYSTEM IN PHOTOLITHOGRAPHY MACHINE
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3888 DONGNANHU ROAD |
CHANGCHUN, JILIN, CHINA 130033 |
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TONG WU |
P.O. BOX 2903 |
MERCHANT & GOULD P.C. |
MINNEAPOLIS, MN 55402-0903 |
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