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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
13779682
Filing Dt:
02/27/2013
Publication #:
20140242883
Pub Dt:
08/28/2014
Inventors:
Benjamin Cherian, Jeffrey Drue David, Boguslaw A. Swedek, Thomas H. Osterheld, Jun Qian et al
Title:
DETERMINATION OF WAFER ANGULAR POSITION FOR IN-SEQUENCE METROLOGY
Assignment: 1
Reel/Frame:
030346/0605Recorded: 05/03/2013Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
CHERIAN, BENJAMIN
Exec Dt:
04/15/2013
DAVID, JEFFREY DRUE
Exec Dt:
04/16/2013
SWEDEK, BOGUSLAW A.
Exec Dt:
04/15/2013
OSTERHELD, THOMAS H.
Exec Dt:
04/15/2013
QIAN, JUN
Exec Dt:
04/15/2013
LI, THOMAS
Exec Dt:
04/15/2013
BENNETT, DOYLE E.
Exec Dt:
04/16/2013
LISCHKA, DAVID J.
Exec Dt:
04/16/2013
ZUNIGA, STEVEN M.
Exec Dt:
04/16/2013
Assignee:
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
DAVID J. GOREN
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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