Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/14/2017
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Application #:
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14349087
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Filing Dt:
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04/02/2014
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Publication #:
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Pub Dt:
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09/11/2014
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PCT #:
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US2012059967
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Inventors:
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Vladimir S. Tarasov, Peter G. Madden, Emanuel M. Sachs, Guy M. Danner, Peter E. Kane et al
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Title:
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APPARATUS FOR DEPOSITING A THIN LAYER OF POLYMER RESIST ON A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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6 PRESTON COURT |
BEDFORD, MASSACHUSETTS 01730 |
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STEVEN J. WEISSBURG |
51 FROST STREET |
CAMBRIDGE, MA 02140 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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6 PRESTON COURT |
BEDFORD, MASSACHUSETTS 01730 |
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STEVEN J. WEISSBURG |
51 FROST STREET |
CAMBRIDGE, MA 02140 |
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