Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14310442
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Filing Dt:
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06/20/2014
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Publication #:
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Pub Dt:
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10/09/2014
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Inventors:
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Hiroshi ASHIHARA, Harunobu SAKUMA, Hideto TATENO, Yuichi WADA
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Title:
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Substrate Processing Device, Method for Manufacturing Semiconductor Device, and Vaporizer
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-1 SOTOKANDA |
| 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 1018980 |
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| JANET DORGAN |
| 9801 WASHINGTONIAN BLVD. |
| SUITE 750 |
| GAITHERSBURG, MD 20878 |
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