Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/14/2017
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Application #:
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14355080
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Filing Dt:
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04/29/2014
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Publication #:
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Pub Dt:
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10/23/2014
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Inventors:
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Yongwen Yuan, Eugene Y. Ivanov, Yang Liu, Phil Frausto, Weifang Miao
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Title:
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SILICON SPUTTERING TARGET WITH SPECIAL SURFACE TREATMENT AND GOOD PARTICLE PERFORMANCE AND METHODS OF MAKING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3600 GANTZ ROAD |
GROVE CITY, OHIO 43123 |
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WEGMAN, HESSLER & VANDERBURG |
6055 ROCKSIDE WOODS BOULEVARD |
SUITE 200 |
CLEVELAND, OH 44131 |
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