Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13869307
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Filing Dt:
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04/24/2013
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Publication #:
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Pub Dt:
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10/30/2014
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Inventors:
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Jianshe Tang, Thomas H. Osterheld, Fred C. Redeker, Gregory E. Menk
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Title:
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METHODS AND APPARATUS USING ENERGIZED FLUIDS TO CLEAN CHEMICAL MECHANICAL PLANARIZATION POLISHING PADS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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BRIAN M. DUGAN |
DUGAN & DUGAN, P.C. |
245 SAW MILL RIVER RD. - SUITE 309 |
HAWTHORNE, NY 10532 |
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