Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/14/2015
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Application #:
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14364933
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Filing Dt:
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06/12/2014
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Publication #:
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Pub Dt:
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11/27/2014
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Inventors:
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Changfeng Xia, Wei Su, Xinwei Zhang, Chengjian Fan
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Title:
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MONITORING STRUCTURE AND MONITORING METHOD FOR SILICON WET ETCHING DEPTH
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 5, HANJIANG ROAD, WUXI, NEW DISTRICT WUXI |
| JIANGSU, CHINA 214028 |
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| MUNCY, GEISSLER, OLDS & LOWE, P.C. |
| 4000 LEGATO ROAD |
| SUITE 310 |
| FAIRFAX, VA 22033 |
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Assignment:
2
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MERGER (SEE DOCUMENT FOR DETAILS).
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| NO. 8 XINZHOU ROAD WUXI NEW DISTRICT |
| JIANGSU, CHINA 214028 |
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| MUNCY, GEISSLER, OLDS & LOWE, P.C. |
| 4000 LEGATO RD., SUITE 310 |
| FAIRFAX, VA 22033 |
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