Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14180552
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Filing Dt:
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02/14/2014
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Publication #:
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Pub Dt:
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12/25/2014
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Inventors:
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Kazuumi Tanaka, Masahiro Sumiya
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Title:
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PLASMA PROCESSING METHOD AND VACUUM PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| MILES & STOCKBRIDGE P.C. |
| MITCHELL W. SHAPIRO |
| 1751 PINNACLE DRIVE, SUITE 500 |
| TYSONS CORNER, VA 22102-3833 |
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