Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/29/2015
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Application #:
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14023563
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Filing Dt:
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09/11/2013
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Publication #:
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Pub Dt:
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03/12/2015
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Inventors:
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Che-Ming Chang, Lee-Chuan Tseng, Shih-Wei Lin, Chih-Jen Chan, Yuan-Chih Hsieh et al
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Title:
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NOBLE GAS BOMBARDMENT TO REDUCE SCALLOPS IN BOSCH ETCHING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 8, LI-HSIN RD. 6 |
| HSIN-CHU SCIENCE PARK |
| HSIN-CHU, TAIWAN 300-77 |
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| ESCHWEILER & ASSOCIATES, LLC. |
| 629 EUCLID AVENUE, SUITE 1000 |
| NATIONAL CITY BANK BUILDING |
| CLEVELAND, OH 44114 |
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