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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
9970818
Issue Dt:
05/15/2018
Application #:
14530164
Filing Dt:
10/31/2014
Publication #:
20150124250
Pub Dt:
05/07/2015
Inventors:
Junwei BAO, Ching-Ling MENG, Holger TUITJE, Mihail MIHAYLOV, Yan CHEN, Zheng YAN et al
Title:
SPATIALLY RESOLVED OPTICAL EMISSION SPECTROSCOPY (OES) IN PLASMA PROCESSING
Assignment: 1
Reel/Frame:
034547/0013Recorded: 12/18/2014Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
BAO, JUNWEI
Exec Dt:
10/31/2014
MENG, CHING-LING
Exec Dt:
11/06/2014
TUITJE, HOLGER
Exec Dt:
11/06/2014
MIHAYLOV, MIHAIL D.
Exec Dt:
11/06/2014
CHEN, YAN
Exec Dt:
11/06/2014
YAN, ZHENG
Exec Dt:
11/06/2014
ZOU, HAIXING
Exec Dt:
11/06/2014
CHU, HANYOU
Exec Dt:
12/16/2014
Assignee:
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME
AKASAKA BIZ TOWER
MINATO-KU, TOKYO, JAPAN 107-6325
Correspondent:
TOKYO ELECTRON U.S. HOLDINGS, INC.
2400 GROVE BLVD.
AUSTIN, TX 78741

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