Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/24/2016
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Application #:
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14087567
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Filing Dt:
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11/22/2013
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Publication #:
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Pub Dt:
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05/28/2015
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Inventors:
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Shao-Yen KU, Hong-Jie XU, Wen-Chang TSAI, Shang-Yuan YU, Chien-Wen HSIAO, Jui-Chuan CHANG
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Title:
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MECHANISMS FOR WAFER CLEANING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO.8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK |
| HSIN-CHU, TAIWAN 300-77 |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| P.O. BOX 747 |
| FALLS CHURCH, VA 22040-0747 |
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