Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14097108
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Filing Dt:
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12/04/2013
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Publication #:
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Pub Dt:
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06/04/2015
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Inventors:
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Piyush Agarwal, Andreas Fischer, Iqbal Shareef, Jason Augustino
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Title:
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ANNULAR BAFFLE FOR PUMPING FROM ABOVE A PLANE OF THE SEMICONDUCTOR WAFER SUPPORT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4650 CUSHING PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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| GEORGE B. LEAVELL, ESQ. |
| 710 LAKEWAY DRIVE |
| SUITE 200 |
| SUNNYVALE, CA 94085 |
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