Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/31/2016
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Application #:
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14099885
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Filing Dt:
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12/06/2013
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Publication #:
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Pub Dt:
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06/11/2015
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Inventors:
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Hongbo Zhang, Qiliang Yan
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Title:
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INTEGRATED MASK-AWARE LITHOGRAPHY MODELING TO SUPPORT OFF-AXIS ILLUMINATION AND MULTI-TONE MASKS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 700 EAST MIDDLEFIELD ROAD |
| MOUNTAIN VIEW, CALIFORNIA 94043 |
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| JUDITH A. SZEPESI |
| BLAKELY, SOKOLOFF, TAYLOR & ZAFMAN LLP |
| 1279 OAKMEAD PARKWAY |
| SUNNYVALE, CA 94085 |
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