Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14426991
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Filing Dt:
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03/10/2015
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Publication #:
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Pub Dt:
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08/20/2015
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Inventor:
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Byung Whan Kim
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Title:
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APPARATUS FOR IMAGING PLASMA PARTICLES AND METHOD FOR DETECTING ETCHING END POINT USING SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| (SEJONG UNIVERSITY, GUNJA-DONG) 209 NEUNGDONG-RO, GWANGJIN-GU |
| SEOUL, KOREA, REPUBLIC OF 143-747 |
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| REVOLUTION IP, PLLC |
| 1940 DUKE ST. |
| SUITE 200 |
| ALEXANDRIA, VA 22314 |
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