Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/29/2017
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Application #:
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14628542
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Filing Dt:
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02/23/2015
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Publication #:
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Pub Dt:
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08/27/2015
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Inventors:
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Michael A. CARCASI, Mark H. SOMERVELL
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Title:
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MITIGATION OF EUV SHOT NOISE REPLICATING INTO ACID SHOT NOISE IN PHOTO-SENSITIZED CHEMICALLY-AMPLIFIED RESIST (PS-CAR)
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3-1 AKASAKA 5-CHOME |
AKASAKA BIZ TOWER |
MINATO-KU, TOKYO, JAPAN 107-6325 |
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TOKYO ELECTRON U.S. HOLDINGS, INC. |
2400 GROVE BLVD. |
AUSTIN, TX 78741 |
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