Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/03/2015
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Application #:
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14349008
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Filing Dt:
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04/01/2014
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Publication #:
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Pub Dt:
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10/22/2015
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Inventors:
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Linlin WANG, Xi CHEN, Shoukun WANG, Jianfeng YUAN
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Title:
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METHOD FOR DETECTING AN ETCHING RESIDUE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 10 JIUXIANQIAO RD., CHAOYANG DISTRICT |
| BEIJING, CHINA 100015 |
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| NO. 118 JINGHAIYILU, BDA |
| BEIJING, CHINA 100176 |
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| BROOKS KUSHMAN P.C. |
| 1000 TOWN CENTER, TWENTY-SECOND FLOOR |
| SOUTHFIELD, MI 48075 |
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