Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/04/2018
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Application #:
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14319927
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Filing Dt:
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06/30/2014
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Publication #:
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Pub Dt:
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12/31/2015
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Inventors:
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Lee CHEN, Audunn LUDVIKSSON
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Title:
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NEUTRAL BEAM ETCHING OF CU-CONTAINING LAYERS IN AN ORGANIC COMPOUND GAS ENVIRONMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| OBLON, SPIVAK, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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