Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/19/2019
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Application #:
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14795625
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Filing Dt:
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07/09/2015
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Publication #:
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Pub Dt:
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01/14/2016
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Inventors:
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Alok Ranjan, Mingmei Wang, Peter L. G. Ventzek
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Title:
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METHODS FOR HIGH PRECISION PLASMA ETCHING OF SUBSTRATES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER |
| 3-1 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 2400 GROVE BLVD. |
| AUSTIN, TX 78741 |
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