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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
04/17/2018
Application #:
14824696
Filing Dt:
08/12/2015
Publication #:
Pub Dt:
02/04/2016
Inventors:
Hendrik Jan Hidde SMILDE, Arno Jan Bleeker, Michael Kubis et al
Title:
Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method
Assignment: 1
Reel/Frame:
036873/0066Recorded: 10/23/2015Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/04/2012
Exec Dt:
01/09/2012
Exec Dt:
01/11/2012
Exec Dt:
01/10/2012
Exec Dt:
01/02/2012
Assignee:
DE RUN 6501
VELDHOVEN, NETHERLANDS NL - 5504 DR
Correspondent:
STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
1100 NEW YORK AVENUE, N.W.
WASHINGTON, DC 20005

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