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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
Issue Dt:
02/21/2017
Application #:
14946284
Filing Dt:
11/19/2015
Publication #:
Pub Dt:
03/17/2016
Inventors:
Johannes Wangler, Kenneth Weible, Manfred Maul, Michael Layh, Uwe Spengler et al
Title:
ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Assignment: 1
Reel/Frame:
040280/0083Recorded: 11/10/2016Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/16/2008
Exec Dt:
09/23/2008
Exec Dt:
09/03/2008
Exec Dt:
09/01/2008
Exec Dt:
08/29/2008
Exec Dt:
09/05/2008
Exec Dt:
08/25/2008
Exec Dt:
09/17/2008
Exec Dt:
09/10/2008
Exec Dt:
09/06/2008
Assignee:
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
KA-LO YEH
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
040589/0062Recorded: 11/10/2016Pages: 6
Conveyance:
MODIFYING CONVERSION
Assignor:
Exec Dt:
10/14/2010
Assignee:
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
KA-LO YEH
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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