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Patent Assignment Abstract of Title

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Total Assignments: 2

Patent #:	NONE	Issue Dt:		Application #:	14852824	Filing Dt:	09/14/2015
Publication #:	20160131980	Pub Dt:	05/12/2016
Inventors:	Aurelian Dodoc, Karl-Heinz Schuster, Joerg Mallmann, Wilhelm Ulrich et al
Title:	MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Assignment: 1

Reel/Frame:

036563/0498

Recorded: 09/15/2015

Pages: 4

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

DODOC, AURELIAN

Exec Dt:

09/17/2004

SCHUSTER, KARL-HEINZ

Exec Dt:

09/10/2004

MALLMANN, JOERG

Exec Dt:

09/23/2004

ULRICH, WILHELM

Exec Dt:

09/13/2004

ROSTALSKI, HANS-JUERGEN

Exec Dt:

09/13/2004

Assignee:

CARL ZEISS SMT AG

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Correspondent:

SEAN P. DALEY

FISH & RICHARDSON P.C.

P.O.BOX 1022

MINNEAPOLIS, MN 55440-1022

Assignment: 2

Reel/Frame:

036643/0029

Recorded: 09/21/2015

Pages: 6

Conveyance:

A MODIFYING CONVERSION

Assignor:

CARL ZEISS SMT AG

Exec Dt:

10/14/2010

Assignee:

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2

OBERKOCHEN, GERMANY 73447

Correspondent:

SEAN P. DALEY

FISH & RICHARDSON P.C.

P.O.BOX 1022

MINNEAPOLIS, MN 55440-1022

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