Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14904912
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Filing Dt:
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01/13/2016
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Publication #:
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Pub Dt:
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06/09/2016
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Inventors:
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Karl-Heinz SCHUSTER, Boris BITTNER, Hendrik WAGNER, Christian WALD, Holger SCHMIDT et al
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Title:
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MIRROR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM AND METHOD FOR PROCESSING A MIRROR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| EDELL, SHAPIRO & FINNAN, LLC |
| 9801 WASHINGTONIAN BOULEVARD |
| SUITE 750 |
| GAITHERSBURG, MD 20878 |
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