Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/31/2017
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Application #:
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14730997
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Filing Dt:
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06/04/2015
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Publication #:
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Pub Dt:
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06/09/2016
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Inventors:
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Sathish Veeraraghavan, Jaydeep Sinha, Pradeep Vukkadala, Soham Dey
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Title:
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PREDICTING AND CONTROLLING CRITICAL DIMENSION ISSUES AND PATTERN DEFECTIVITY IN WAFERS USING INTERFEROMETRY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ONE TECHNOLOGY DRIVE |
MILPITAS, CALIFORNIA 95035 |
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SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER |
14301 FNB PARKWAY |
SUITE 220 |
OMAHA, NE 68154-5299 |
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