Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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08/21/2018
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Application #:
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14952073
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Filing Dt:
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11/25/2015
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Publication #:
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Pub Dt:
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06/16/2016
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Inventors:
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Frederik Blumrich, Thomas Scherübl, Jan Hendrik Peters, Anthony Garetto, Renzo Capelli
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Title:
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Method and System for EUV Mask Blank Buried Defect Analysis
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Assignment:
1
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MERGER (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| MARC WEFERS |
| FISH & RICHARDSON P.C. |
| P.O.BOX 1022 |
| MINNEAPOLIS, MN 55440-1022 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| J. GRANT HOUSTON |
| HOUSTONHOGLE LLP |
| 1666 MASSACHUSETTS AVENUE, SUITE 12 |
| LEXINGTON, MA 02420 |
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