Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/06/2016
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Application #:
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14645646
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Filing Dt:
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03/12/2015
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Publication #:
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Pub Dt:
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07/28/2016
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Inventors:
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Tristan Y. Ma, Maureen K. Petterson, John Hautala, Ludovic Godet
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Title:
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MULTIPLE EXPOSURE TREATMENT FOR PROCESSING A PATTERNING FEATURE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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35 DORY ROAD |
022671 |
GLOUCESTER, MASSACHUSETTS 01930 |
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VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE |
35 DORY ROAD |
GLOUCESTER, MA 01930-2297 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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35 DORY ROAD |
GLOUCESTER, MASSACHUSETTS 01930 |
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KACVINSKY DAISAK BLUNI PLLC |
3120 PRINCETON PIKE |
SUITE 303 |
LAWRENCEVILLE, NJ 08648 |
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