Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/12/2017
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Application #:
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13395878
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Filing Dt:
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11/10/2015
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Publication #:
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Pub Dt:
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09/15/2016
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Inventors:
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Stephen DANIELS, Shane Glynn, Felipe Soberon, Paul Maguire
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Title:
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METHOD AND APPARATUS FOR THE DETECTION OF ARC EVENTS DURING THE PLASMA PROCESSING OF A WAFER, SURFACE OF SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| INVENT CENTER |
| GLASNEVIN |
| DUBLIN, IRELAND 9 |
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| HITT GAINES, P.C. |
| P.O. BOX 832570 |
| RICHARDSON, TX 75083 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2901 EISENHOWER STREET |
| CARROLLTON, TEXAS 75007 |
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| HITT GAINES, P.C. |
| P.O. BOX 832570 |
| RICHARDSON, TX 75083 |
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