Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
02/05/2019
|
Application #:
|
15216951
|
Filing Dt:
|
07/22/2016
|
|
Publication #:
|
|
Pub Dt:
|
11/10/2016
| | | | |
|
Inventors:
|
Zhigang MAO, Xiaoyi CHEN, Amitabh SABHARWAL, Ajay KUMAR
|
|
Title:
|
METHOD FOR IMPROVING CD MICRO-LOADING IN PHOTOMASK PLASMA ETCHING
|
|
|
Assignment:
1
|
|
|
|
|
|
|
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
|
|
|
|
| PATTERSON + SHERIDAN, LLP |
| 595 SHREWSBURY AVE |
| SUITE 100 |
| SHREWSBURY, NJ 07702 |
|
|
Search Results as of:
05/31/2024 11:00 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
