Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/01/2019
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Application #:
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15264955
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Filing Dt:
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09/14/2016
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Publication #:
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Pub Dt:
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01/05/2017
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Inventors:
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Kenta YASUDA, Toru KUBOTA, Takashi KONDO, Katsuhiro ISHIDA
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Title:
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PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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| 1-1, SHIBAURA 1-CHOME |
| MINATO-KU, TOKYO, JAPAN 105-8001 |
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| OBLON, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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