Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15210872
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Filing Dt:
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07/14/2016
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Publication #:
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Pub Dt:
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03/02/2017
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Inventors:
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Jin-su KIM, Jae-hyuck CHOI, Byung-gook KIM, Soo-wan KOH
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Title:
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PHOTOMASK CLEANING APPARATUS, METHOD OF CLEANING A PHOTOMASK, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 129, SAMSUNG-RO, YEONGTONG-GU |
| SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 16677 |
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| MUIR PATENT LAW, PLLC |
| P.O. BOX 1213 |
| GREAT FALLS, VA 22066 |
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