Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/15/2017
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Application #:
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14844438
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Filing Dt:
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09/03/2015
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Publication #:
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Pub Dt:
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03/09/2017
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Inventors:
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Ai-Jen Hung, Chen-Yen Huang, Shin-Rung Lu, Yen-Di Tsen
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Title:
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INTRA-FIELD PROCESS CONTROL FOR LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK |
HSIN-CHU, TAIWAN 300-77 |
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ESCHWEILER & ASSOCIATES, LLC. |
629 EUCLID AVENUE, SUITE 1000 |
NATIONAL CITY BANK BUILDING |
CLEVELAND, OH 44114 |
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