Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/30/2018
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Application #:
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15334179
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Filing Dt:
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10/25/2016
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Publication #:
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Pub Dt:
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04/27/2017
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Inventors:
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Hiromitsu SAKAUE, Shinya OKANO
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Title:
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SUBSTRATE COOLING METHOD, SUBSTRATE TRANSFER METHOD, AND LOAD-LOCK MECHANISM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| TELF C/O MURABITO HAO AND BARNES, LLP |
| TWO NORTH MARKET STREET |
| THIRD FLOOR |
| SAN JOSE, CA 95113 |
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