Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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14940539
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Filing Dt:
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11/13/2015
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Publication #:
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Pub Dt:
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05/18/2017
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Inventors:
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Leonid Dorf, Shahid Rauf, Vladimir Knyazik, Philip A. Kraus, Ying Zhang
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Title:
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UNIFORM LOW ELECTRON TEMPERATURE PLASMA SOURCE WITH REDUCED WAFER CHARGING AND INDEPENDENT CONTROL OVER RADICAL COMPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| ROBERT M. WALLACE |
| 2112 EASTMAN AVENUE, SUITE 102 |
| LAW OFFICE OF ROBERT M. WALLACE |
| VENTURA, CA 93003 |
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