Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/10/2018
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Application #:
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15473879
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Filing Dt:
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03/30/2017
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Publication #:
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Pub Dt:
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07/20/2017
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Inventors:
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Murat BOZKURT, Martin Jacobus Johan JAK, Patricius Aloysius Jacobus TINNEMANS
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Title:
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Method of Measuring a Property of a Target Structure, Inspection Apparatus, Lithographic System and Device Manufacturing Method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| DE RUN 6501 |
| VELDHOVEN, NETHERLANDS NL - 5504 DR |
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| STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005 |
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