Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15416326
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Filing Dt:
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01/26/2017
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Publication #:
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Pub Dt:
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08/03/2017
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Inventors:
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Dong-Soo KIM, Min-Su JOO, Min Kyu CHU
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Title:
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CLEANING APPARATUS FOR AN EXHAUST PATH OF A PROCESS REACTION CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 100 CUMMINGS CENTER |
| SUITE 324-J |
| BEVERLY, MASSACHUSETTS 01915 |
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| PRETI FLAHERTY BELIVEAU & PACHIOS LLP |
| 60 STATE STREET |
| SUITE 1100 |
| BOSTON, MA 02109 |
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