Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/04/2018
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Application #:
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15503415
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Filing Dt:
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02/13/2017
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Publication #:
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Pub Dt:
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10/05/2017
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Inventors:
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Hiroaki SHISHIDO, Osamu NOZAWA, Takenori KAJIWARA
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Title:
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MASK BLANK, PHASE SHIFT MASK, METHOD FOR MANUFACTURING PHASE SHIFT MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-10-1 NISHI-SHINJUKU |
| SHINJUKU-KU, TOKYO, JAPAN 1608347 |
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| SUGHRUE MION, PLLC |
| 2100 PENNSYLVANIA AVENUE, NW |
| SUITE 800 |
| WASHINGTON, DC 20037 |
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