Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/28/2018
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Application #:
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15477602
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Filing Dt:
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04/03/2017
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Publication #:
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Pub Dt:
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10/12/2017
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Inventors:
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Maurits VAN DER SCHAAR, Richard Johannes Franciscus VAN HAREN et al
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Title:
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Metrology Target, Method and Apparatus, Target Design Method, Computer Program and Lithographic System
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C |
| 1100 NEW YORK AVENUE, N.W. |
| WASHINGTON, DC 20005 |
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