Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/29/2019
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Application #:
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15509522
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Filing Dt:
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03/08/2017
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Publication #:
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Pub Dt:
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10/19/2017
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Inventors:
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Yuki Hosaka, Yoshihiro Umezawa, Toshiki Nakajima, Koichi Nagakura
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Title:
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TEMPERATURE CONTROL DEVICE FOR PROCESSING TARGET OBJECT AND METHOD OF SELECTIVELY ETCHING NITRIDE FILM FROM MULTILAYER FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| PEARNE & GORDON LLP |
| 1801 EAST 9TH STREET |
| SUITE 1200 |
| CLEVELAND, OH 44114-3108 |
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