Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/31/2019
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Application #:
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15672660
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Filing Dt:
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08/09/2017
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Publication #:
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Pub Dt:
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02/15/2018
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Inventors:
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Masayuki MIYAKE, Goji WAKAMATSU, Tsubasa ABE, Kazunori SAKAI, Kazunori TAKANASHI
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Title:
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RESIST UNDERLAYER FILM-FORMING COMPOSITION, RESIST UNDERLAYER FILM, RESIST UNDERLAYER FILM-FORMING PROCESS, AND PRODUCTION METHOD OF PATTERNED SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 9-2, HIGASHI-SHINBASHI 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| OBLON, ET AL. |
| 1940 DUKE STREET |
| ALEXANDRIA, VA 22314 |
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