Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15658450
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Filing Dt:
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07/25/2017
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Publication #:
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Pub Dt:
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02/15/2018
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Inventor:
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Yanchun LU
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Title:
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PHOTORESIST PRE-BAKING METHOD, PHOTORESIST PRE-BAKING DEVICE AND LITHOGRAPHIC APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 10, JIUXIANQIAO RD. |
| CHAOYANG DISTRICT |
| BEIJING, CHINA 100015 |
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| NO. 668 LONGZIHU RD. |
| XINZHAN GENERAL PILOT ZONE, HEFEI |
| ANHUI, CHINA 230012 |
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| TODD R. TUCKER |
| CALFEE, HALTER & GRISWOLD LLP |
| THE CALFEE BUILDING, 1405 EAST SIXTH ST. |
| CLEVELAND, OH 44114 |
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