Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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15655950
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Filing Dt:
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07/21/2017
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Publication #:
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Pub Dt:
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02/15/2018
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Inventors:
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Guangming ZHANG, Wei LI, Kai YU, Hongming QU
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Title:
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DRY-ETCH DEVICE AND A LOWER ELECTRODE THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 10 JIUXIANQIAO RD. |
| CHAOYANG DISTRICT |
| BEIJING, CHINA 100015 |
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| NO. 118 JINGHAIYI RD., BDA |
| BEIJING, CHINA 100176 |
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| TODD R. TUCKER |
| CALFEE, HALTER & GRISWOLD LLP |
| THE CALFEE BUILDING, 1405 EAST SIXTH ST. |
| CLEVELAND, OH 44114 |
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