Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/06/2019
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Application #:
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15534798
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Filing Dt:
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06/09/2017
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Publication #:
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Pub Dt:
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09/13/2018
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Inventors:
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Kazuki ANADA, Yuichi YOSHII
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Title:
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ELECTROSTATIC CHUCK AND WAFER PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1-1, NAKASHIMA 2-CHOME, KOKURAKITA-KU |
KITAKYUSHU-SHI, FUKUOKA, JAPAN 802-8601 |
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CARRIER BLACKMAN & ASSOCIATES, P. C. |
22960 VENTURE DRIVE, SUITE 100 |
NOVI, MI 48375 |
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