Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/19/2021
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Application #:
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15934525
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Filing Dt:
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03/23/2018
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Publication #:
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Pub Dt:
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09/27/2018
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Inventors:
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Fumiaki Sato, Suguru Hirokawa, Masamitsu Shinozuka
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Title:
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WAFER HOLDING DEVICE AND WAFER CHUCKING AND DECHUCKING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, OSAKI 2-CHOME, SHINAGAWA-KU |
| TOKYO, JAPAN 141-6025 |
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| MICHAEL BEST & FRIEDRICH LLP (DC) |
| 100 E WISCONSIN AVENUE |
| SUITE 3300 |
| MILWAUKEE, WI 53202 |
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