Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/14/2021
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Application #:
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16008585
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Filing Dt:
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06/14/2018
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Publication #:
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Pub Dt:
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10/18/2018
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Inventors:
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Sean R. Kirkpatrick, Rangarajan Jagannathan
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Title:
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METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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20 FORTUNE DRIVE |
BILLERICA, MASSACHUSETTS 02110 |
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BURNS & LEVINSON, LLP |
125 SUMMER STREET |
BOSTON, MA 02110 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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20 FORTUNE DRIVE |
BILLERICA, MASSACHUSETTS 01821 |
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BURNS & LEVINSON LLP |
125 HIGH STREET |
BOSTON, MA 02110 |
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09/23/2024 07:33 AM
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