Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/13/2018
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Application #:
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15593732
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Filing Dt:
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05/12/2017
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Publication #:
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Pub Dt:
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11/15/2018
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Inventors:
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Alexander I. Ershov, John Tom Stewart IV, Igor V. Fomenkov et al
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Title:
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APPARATUS FOR AND METHOD OF CONTROLLING DEBRIS IN AN EUV LIGHT SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| AH VELDHOVEN, NETHERLANDS 5500 |
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| ANTHONY W. SHAW |
| 1675 BROADWAY |
| ARENT FOX LLP |
| NEW YORK, NY 10019 |
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