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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
10191382
Issue Dt:
01/29/2019
Application #:
15963132
Filing Dt:
04/26/2018
Publication #:
20180335702
Pub Dt:
11/22/2018
Inventors:
Erich Schubert, Alexander Kohl, Gerhard-Wilhelm Ziegler, Michael Patra et al
Title:
ILLUMINATION SYSTEM FOR ILLUMINATING A MASK IN A MICROLITHOGRAPHIC EXPOSURE APPARATUS
Assignment: 1
Reel/Frame:
046021/0931Recorded: 04/26/2018Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
SCHUBERT, ERICH
Exec Dt:
06/18/2010
KOHL, ALEXANDER
Exec Dt:
06/24/2010
ZIEGLER, GERHARD-WILHELM
Exec Dt:
06/23/2010
PATRA, MICHAEL
Exec Dt:
06/21/2010
DEGUENTHER, MARKUS
Exec Dt:
06/29/2010
LAYH, MICHAEL
Exec Dt:
06/18/2010
Assignee:
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
CHRISTOPHER C. BOWLEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022
Assignment: 2
Reel/Frame:
046022/0537Recorded: 04/26/2018Pages: 6
Conveyance:
MODIFYING CONVERSION
Assignor:
CARL ZEISS SMT AG
Exec Dt:
10/14/2010
Assignee:
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2
OBERKOCHEN, GERMANY 73447
Correspondent:
CHRISTOPHER C. BOWLEY
FISH & RICHARDSON P.C.
P.O.BOX 1022
MINNEAPOLIS, MN 55440-1022

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