Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/03/2020
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Application #:
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16122495
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Filing Dt:
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09/05/2018
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Publication #:
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Pub Dt:
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01/03/2019
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Inventors:
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Yuval LUBASHEVSKY, Vladimir LEVINSKI, Yuri PASKOVER, Amnon MANASSEN
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Title:
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DIFFRACTION BASED OVERLAY SCATTEROMETRY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| KLA-TENCOR CORPORATION / HODGSON RUSS LL |
| THE GUARANTY BUILDING |
| 140 PEARL STREET, SUITE 100 |
| BUFFALO, NY 14202-4040 |
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